Co-Integration
ELMOS answers to the increasing demands for robust systems have lead to monolithic integrated pressure sensors segments by combining standard CMOS and MEMS process. ELMOS provides a solution for pressure measurement, that does not need any long electrical connections between sensor and conditioning circuit. Also the product reduces the assembly effort and increases the reliability. As a plus, this solution is space saving compared to typical two-chip devices and cost perspective it is cheaper in assembly. ELMOS delivers this product for a multitude of applications e.g. customer’s subsequent processing or as packaged finished product.
Customer benefits
- Standard CMOS-process & MEMS-process
- Easy test of complete systems
- Optimized combination of sensor and ASIC design
- No performance loss at sensor-ASIC interface
- High reliability due to separated sensor-ASIC bond interfaces
- Robustness against external interferences
- Effective assembly: complete system in one assembly step-less mounting space needed