Sensors (MEMS)

ELMOS now provides micro-mechanical technologies in bulk and thin film engineering, necessary for the production of sensor elements and sensor systems.

Areas of competence in the field of sensors are:

• Micro-electronical mechanical sensor elements

• Sensor systems with co-integrated micro-electronics

• The most up-to-date MEMS production on 100 and 150 mm wafers (4'' and 6'')

• MEMS foundry service

• Pressure sensors (low and high pressure, absolute and differential) for automotive,
  industrial and medical applications

• Optical sensors

• Acceleration sensors

• Rotation rate sensors