This co-integrated pressure sensor combines the ELMOS CMOS Technology with state-of-the-art pressure sensors and innovative packages. An intelligent calibration algorithm and the possibility to store calibration data in the integrated EEPROM give rise to a fully-integrated high-precision pressure sensor with evaluation electronics and interface.

• Digital calibration algorithm for the highest possible precision (less than 0.5% with temperature und pressure fluctuations)

• Calibration coefficients in the embedded EEPROM

• Digital and analogue interface
• Variants: Absolute, relative and differential pressure

Mini-Sensors SM5108 and SM5420 

The SM5108 is an extremely small, piezoresistive absolute-pressure sensor with an edge length of 0.65mm. It can be delivered as a bare die as well as SO8-packaged standard variety (SM5420). Due to its small dimensions the sensor and the ASIC together make a superb combination as a system-in-a-package. For the production of the sensor we employ the so-called DRIE-technology. The product covers all kinds of pressure ranges, from 1bar to 10bar as die-variety, or 1bar to 6.7bar as an SO8 packaged variety. The component withstands up to f times the pressure range without any damage.

System in a package

The package includes active und passive components integrated in a cavity overmoulded package. This system for example is able to measure the oil quality in the automobile: even highest temperatures over a long periode do not influence the performance of the system.

Optical µ-Mouse

• Creating an optic µ Mouse according to the HALIOS principle
• Optic special package on the basis of TQFP36 (10x10mm²)
• Integration of ASIC, reception, compensation and transmission LEDs
• Functional Leadframe with globtop-overmolded transmission LEDs in mirrored leadframe cavities